- Vacuum tube - 1946-1957
- Transistor - 1958-1964
- Small scale integration - 1965 on
- Up to 100 devices on a chip
- Medium scale integration - to 1971
- 100 to 3.000 devices on a chip
- Large scale integration - 1971-1977
- 3.000 to 100.000 devices on a chip
- Very large scale integration - 1978 to date
- 100000-100000000 devices on a chip
- Ultra large scale integration
- Over 100 million devices on a chip
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